Clay Klein
- Postdoctoral Student
- SPIN ELECTRONICS GROUP
Project Description
The research assistant focuses on performing novel extreme ultraviolet (EUV) experiments to measure the dimensions of periodic patterned films at length scales relevant to the semiconductor industry. These measurements will be correlated with detailed dimensional measurements performed by NIST. In addition, the research assistant works on fitting collected experimental data using electromagnetic simulations to obtain parametric values and uncertainties of these dimensions.
Research Interests
Extreme ultraviolet and x-ray light sources based on high harmonic generation and their application to nanoscale metrology and imaging