Plasma (Dry) Etch Tools

Instrument/ServiceType:

Reactive Ion Etcher & Inductively Coupled Plasma Etcher

Make/ Model:

PlasmaTherm 540/790 & STS LPX-ICP

Instrument Description:

For anisotropic & high aspect ratio deep etch

Instrument Website URL: 

http://cnl.colorado.edu/cnl/index.php?option=com_content&view=article&id=211&Itemid=155

Primary Contact:

Tzu-Min Ou       

Email: cnl@colorado.edu

Instrument Location:

Engineering Center, room ECEE271